The setup consists of the following equipments:
- Keithley 196 Digital Multimeter
- Keithley 617 Programmable Electrometer
- Keithley 595 Quasistatic CV meter
- Keithley 195A Digital Multimeter
- Keithley 236 Source Measure Unit
- KarlSuss Probestation:
- Five DC probes (up to 12 probes is supported)
- Vacuum chuck
- 4X microscope
The following software are supported: