The setup consists of the following equipments:
- Keithley 4200, Semiconductor Characterization System
- Current Source: (105nA /5pA to 105mA /5µA)
- Current Measure (105nA /1pA to 105mA /1µA)
- Voltage Source (210mV /5µV to 210V /5mV)
- Voltage (210mV /1µV to 210V /1mV)
- Keithley 4200-PA, Remote Pre-Amplifier
- Current Source: (1.05pA /50aA to 105mA /5µA)
- Current Measure (1.05pA /10aA to 105mA /1µA)
- Keithley Model 82, Simultaneous C-V Measurement
- Quasistatic C-V
- High frequency C-V (100KHz and 1MHz)
- Cascade Summit 12000, Automatic probestation
- Temptronic TP03215B, ThermoChuck System
- Temperature range (0ºC to +300 ºC)
- AttoGuard Shield Box, Low noise measurement
The following software are supported:
- Nucleus for controlling the probestation