Picture of Semiconductor Characterization System
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2nd Responsible:
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The setup consists of the following equipments:

  • Keithley 4200, Semiconductor Characterization System
    • Current Source: (105nA /5pA to 105mA /5µA)
    • Current Measure (105nA /1pA to 105mA /1µA)
    • Voltage Source (210mV /5µV to 210V /5mV)
    • Voltage (210mV /1µV to 210V /1mV)
  • Keithley 4200-PA, Remote Pre-Amplifier
    • Current Source: (1.05pA /50aA to 105mA /5µA)
    • Current Measure (1.05pA /10aA to 105mA /1µA)
  • Keithley Model 82, Simultaneous C-V Measurement
    • Quasistatic C-V
    • High frequency C-V (100KHz and 1MHz)
  • Cascade Summit 12000, Automatic probestation
  • Temptronic TP03215B, ThermoChuck System
    • Temperature range (0ºC to +300 ºC)
  • AttoGuard Shield Box, Low noise measurement

The following software are supported:

  • Nucleus for controlling the probestation

 

Tool name:
Semiconductor Characterization System
Area/room:
B540 (Solid State Electronic Lab)
Category:
Setup
Manufacturer:
Keithley/Cascade/AttoGuard
Model:
4200
Max booking time, day:
4 hours
Max booking time, night:
14 hours
No. of future bookings:
3

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