Picture of Setup: Thermal
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Mattias Thorsell
2nd Responsible:
Niklas Rorsman
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Description

Thermal probe station for on-wafer measurements . The setup consists of the following equipment:

Instrument Manufacturer Model S/N
VNA Anritsu MS4647A 1335447
Probe station Cascade 11000 1100
Bias supply Hameg HMP4040 14430200
Source meter Kiethley 2600 4506702
Multimeter Agilent 34401A  
Computer Shuttle DH170 MC2-M051
E-fuse Agil 100-10 920062
Thermal chuck TempTronic    
ENA Agilent E5061B MY49100235
       
Accessories Manufacturer Model S/N
Receiver module Anritsu SM6827 1533010
mm-wave module Anritsu 3743A 1331018
mm-wave module Anritsu 3743A 1331019
Illuminator    FOI-150  
Test-set Anritsu 3739B 133501
mm-wave module Anritsu MA25300A 1528015
mm-wave module Anritsu MA25300A 1528016
 
Details
Tool name:
Setup: Thermal
Area/room:
B639 (Microwave Device Lab)
Category:
Setup
Manufacturer:
Various
Model:
Probe station
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Tool Modes
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