Cascade summit 12000 semi-automatic probe station.

Micropositioners:

• 4 regular probe tips (5 µm radius)
• 2 optional Kelvin probe tips for small contacts (for contact pad sizes < 40 µm)
• 2 optional rf GSG probes

Parameter analyzer: Keithley B1500A with

• 4 HRSMU: high resolution IV units
• 1 CMU: CV unit
• 1 SCUU: IV/CV unifying unit

Computer with matlab